NSF - Major Research Instrumentation (MRI) granted to UPRM for the establishment of MEMS lab

Recently, NSF granted $454,509 for the establishment of a class 100 modular cleanroom at UPRM. The equipment in the cleanroom will include photolithography, dry-etching and wet processing capabilities as well as a cryogenic probe station for the testing of RF MEMS.

The researchers involved in the proposal are: Dr.Nelson Sepulveda (PI, ECE), Dr. Agnes Padovani (Co-PI, ESM), Dr. Ruben Diaz (Co-PI, ME), Dr. Felix Fernandez (Co-PI, Physics) and Dr. Rafael A. Rodriguez (Co-PI, ECE). This has allowed the creation of a truly multidisciplinary MEMS research group in Puerto Rico.

The funding has allowed the creation of the first MEMS research group in Puerto Rico µanDReG